Recent Findings from Jeonbuk National University Highlight Research in Surface Science (Structural and chemical evolution of fluorocarbon coatings on reactor walls and their run-to-run impacts on film deposition in C4F8/Ar/N2 plasma processing)

Media coverage

• Title	Recent Findings from Jeonbuk National University Highlight Research in Surface Science (Structural and chemical evolution of fluorocarbon coatings on reactor walls and their run-to-run impacts on film deposition in C4F8/Ar/N2 plasma processing)
  Media name/outlet	NewsRx Science Daily
  Country/Territory	United States
  Date	26.02.26
  Persons	Se Youn Moon