Researchers at Seoul National University Report New Data on Plasma Etching (Adaptive Learning Strategies for Addressing Chamber Variations In Real-time Endpoint Detection of Semiconductor Plasma Etching)

Media coverage

• Title	Researchers at Seoul National University Report New Data on Plasma Etching (Adaptive Learning Strategies for Addressing Chamber Variations In Real-time Endpoint Detection of Semiconductor Plasma Etching)
  Media name/outlet	South Korea Daily Report
  Country/Territory	United States
  Date	25.12.12
  Persons	Sun Jun Kim, Min-Ho Lee, Min Ro Lee