주사 전자 현미경과 결합한 QTF-원자힘 현미경 개발

Atomic force microscopy (AFM) is widely used for surface analysis due to its versatility and ability to provide 3D surface information. Especially, the quartz tuning fork (QTF)-AFM enables highly sensitive measurements with a simple electronic circuit, while scanning electron microscopy (SEM) allows rapid high-resolution imaging over large areas. To combine the strengths of these two techniques, a hybrid system integrating QTF-AFM and SEM was developed to analyze how the QTF, a key component, responds in a vacuum environment depending on the presence of the probe under vacuum and electron beam exposure. As a results, in a vacuum environment, it was observed that the QTF’s quality factor (Q) increased when transitioning from atmospheric pressure to vacuum, and the amplitude of the resonant frequency slightly decreased but stabilized over time with minimal phase change.