3D nano object recognition based on phase measurement technique

Spectroscopic ellipsometry (SE) has become an important tool in scatterometry based nano- structure 3D profiling. In this paper, we propose a novel 3D nano object recognition method by use of phase sensitive scatterometry. We claims that only phase sensitive scatterometry can provide a reasonable 3D nano-object recognition capability since phase data gives much higher sensitive 3D information than amplitude data. To show the validity of this approach, first we generate various 0 order SE spectrum data (ψ and Δ) which can be calculated through rigorous coupled- wave analysis (RCWA) algorithm and then we calculate correlation values between a reference spectrum and an object spectrum which is varied for several different object 3D shape.