A 15-to-45 GHz low-loss analog reflection-type MEMS phase shifter

Sanghyo Lee; Jae Hyoung Park; Hong Teuk Kim; Jung Mu Kim; Yong Kweon Kim; Youngwoo Kwon

A 15-to-45 GHz low-loss analog reflection-type MEMS phase shifter

Sanghyo Lee^*
, Jae Hyoung Park
, Hong Teuk Kim
, Jung Mu Kim
, Yong Kweon Kim
, Youngwoo Kwon

^*Corresponding author for this work

Division of Electronic Engineering

Seoul National University

Research output: Contribution to journal › Conference article › peer-review

9 Scopus citations

Abstract

A low-loss broadband reflection-type phase shifter (RTPS), showing constant phase shift from 15 to 45 GHz, was developed using MEMS technology. The analog phase shifter consists of two cascaded reflection-type phase shifters for 1:3 bandwidth. Air-gap overlay CPW couplers were employed for low-loss 3 dB coupling, and bridge-type MEMS variable capacitors were used for low-loss reflective terminations. The fabricated phase shifter shows the average insertion loss of 3.63dB, and rms phase error of 3.7° from 15 to 45 GHz. Compared with the similar RTPS using GaAs PHEMT varactor diodes, much lower loss is observed together with improved bandwidth.

Original language	English
Pages (from-to)	1493-1496
Number of pages	4
Journal	IEEE MTT-S International Microwave Symposium Digest
Volume	3
State	Published - 2003
Event	2003 IEEE MTT-S International Microwave Symposium Digest - Philadelphia, PA, United States Duration: 2003.06.8 → 2003.06.13

Cite this

@article{a9e8c9ddee554d5eaf01460edab5a04c,

title = "A 15-to-45 GHz low-loss analog reflection-type MEMS phase shifter",

abstract = "A low-loss broadband reflection-type phase shifter (RTPS), showing constant phase shift from 15 to 45 GHz, was developed using MEMS technology. The analog phase shifter consists of two cascaded reflection-type phase shifters for 1:3 bandwidth. Air-gap overlay CPW couplers were employed for low-loss 3 dB coupling, and bridge-type MEMS variable capacitors were used for low-loss reflective terminations. The fabricated phase shifter shows the average insertion loss of 3.63dB, and rms phase error of 3.7° from 15 to 45 GHz. Compared with the similar RTPS using GaAs PHEMT varactor diodes, much lower loss is observed together with improved bandwidth.",

author = "Sanghyo Lee and Park, \{Jae Hyoung\} and Kim, \{Hong Teuk\} and Kim, \{Jung Mu\} and Kim, \{Yong Kweon\} and Youngwoo Kwon",

year = "2003",

language = "English",

volume = "3",

pages = "1493--1496",

journal = "IEEE MTT-S International Microwave Symposium Digest",

issn = "0149-645X",

note = "2003 IEEE MTT-S International Microwave Symposium Digest ; Conference date: 08-06-2003 Through 13-06-2003",

}

TY - JOUR

T1 - A 15-to-45 GHz low-loss analog reflection-type MEMS phase shifter

AU - Lee, Sanghyo

AU - Park, Jae Hyoung

AU - Kim, Hong Teuk

AU - Kim, Jung Mu

AU - Kim, Yong Kweon

AU - Kwon, Youngwoo

PY - 2003

Y1 - 2003

N2 - A low-loss broadband reflection-type phase shifter (RTPS), showing constant phase shift from 15 to 45 GHz, was developed using MEMS technology. The analog phase shifter consists of two cascaded reflection-type phase shifters for 1:3 bandwidth. Air-gap overlay CPW couplers were employed for low-loss 3 dB coupling, and bridge-type MEMS variable capacitors were used for low-loss reflective terminations. The fabricated phase shifter shows the average insertion loss of 3.63dB, and rms phase error of 3.7° from 15 to 45 GHz. Compared with the similar RTPS using GaAs PHEMT varactor diodes, much lower loss is observed together with improved bandwidth.

AB - A low-loss broadband reflection-type phase shifter (RTPS), showing constant phase shift from 15 to 45 GHz, was developed using MEMS technology. The analog phase shifter consists of two cascaded reflection-type phase shifters for 1:3 bandwidth. Air-gap overlay CPW couplers were employed for low-loss 3 dB coupling, and bridge-type MEMS variable capacitors were used for low-loss reflective terminations. The fabricated phase shifter shows the average insertion loss of 3.63dB, and rms phase error of 3.7° from 15 to 45 GHz. Compared with the similar RTPS using GaAs PHEMT varactor diodes, much lower loss is observed together with improved bandwidth.

UR - https://www.scopus.com/pages/publications/0041590990

M3 - Conference article

AN - SCOPUS:0041590990

SN - 0149-645X

VL - 3

SP - 1493

EP - 1496

JO - IEEE MTT-S International Microwave Symposium Digest

JF - IEEE MTT-S International Microwave Symposium Digest

T2 - 2003 IEEE MTT-S International Microwave Symposium Digest

Y2 - 8 June 2003 through 13 June 2003

ER -

A 15-to-45 GHz low-loss analog reflection-type MEMS phase shifter

Abstract

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