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A 35-60 GHz single-pole double-throw(SPDT) switching circuit using direct contact MEMS switches and double resonance technique

  • J. H. Park
  • , S. Lee
  • , J. M. Kim
  • , Y. Kwon
  • , Y. K. Kim
  • Seoul National University

Research output: Contribution to conferenceConference paperpeer-review

Abstract

In this paper, a single-pole double-throw(SPDT) switching circuit was demonstrated using direct contact MEMS switches and double resonance technique for Q-band and V-band applications. The size of the fabricated SPDT switching circuit is about 1 mm x 2 mm. The direct contact MEMS switches are formed on the CPW transmission lines and actuated with electrostatic force. The fabricated single-pole single-throw(SPST) MEMS switch shows the insertion loss of 0.34 dB and the isolation of 15.5 dB at 50 GHz, respectively. The responses of the fabricated SPDT switching circuit were measured with the frequencies from 0 to 100 GHz. The insertion loss is below 1 dB and isolation is better than 19 dB from 35 GHz to 60 GHz. At the center frequency of 47 GHz, the insertion loss is measured 0.45 dB and isolation is 22 dB. The actuation voltage of the switch is 35V.

Original languageEnglish
Title of host publicationTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1796-1799
Number of pages4
ISBN (Electronic)0780377311, 9780780377318
DOIs
StatePublished - 2003
Event12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States
Duration: 2003.06.82003.06.12

Publication series

NameTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Volume2

Conference

Conference12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
Country/TerritoryUnited States
CityBoston
Period03.06.803.06.12

Keywords

  • Contacts
  • Coplanar waveguides
  • Distributed parameter circuits
  • Electrostatics
  • Frequency measurement
  • Insertion loss
  • Microswitches
  • Resonance
  • Switches
  • Switching circuits

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