@inproceedings{1babe7a389c04523a9dc17b5f4e513cc,
title = "A 5-17 GHz wideband reflection-type phase shifter using digitally operated capacitive MEMS switches",
abstract = "In this paper, a micromachined low-loss and ultra wideband reflection-type phase shifter (RTPS) is proposed. The phase shifter shows a constant phase shift from 5 to 17 GHz and consists of two cascaded reflection-type phase shifter. Low-loss reflection termination consists of digital capacitive switches, and air-gap overlay CPW couplers are used in order to employ the low-loss 3 dB coupling. The fabricated phase shifter showed the 5 discrete states, 0°, 22.5°, 45°, 67.5°, 90° respectively, the average insertion loss of 3.48 dB, and maximum rms phase error of ± 1.80° for the relative phase sift from 0° to 90° over 5-17GHz.",
keywords = "Air gaps, Coplanar waveguides, Couplers, Insertion loss, Microswitches, Phase shifters, Reflection, Switches, Termination of employment, Ultra wideband technology",
author = "Kim, \{Jung Mu\} and Sanghyo Lee and Park, \{Jae Hyoung\} and Baek, \{Chang Wook\} and Youngwoo Kwon and Kim, \{Yong Kweon\}",
note = "Publisher Copyright: {\textcopyright} 2003 IEEE.; 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers ; Conference date: 08-06-2003 Through 12-06-2003",
year = "2003",
doi = "10.1109/SENSOR.2003.1215622",
language = "English",
series = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "907--910",
booktitle = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
}