Abstract
SrBi2Ta2O9 (SBT) thin films have attracted much attention due to their fatigue-free properties for ferroelectric random access memory (FRAM) applications. It was believed that the fatigue-free characteristics of SBT should be originated from the presence of the (Bi2O2)2+ layers in the Bi-layered perovskite structure. However, Bi4Ti3O12 (BTO) films showed fatigue failures although they have the same crystal structure and the (Bi2O2)2+ layers. Recently, we elucidated the differences in SBT and BTO films using XPS studies, and claimed that the oxygen chemical stability in the perovskite layers should play an important role in the fatigue-free behaviors. Based on this finding, we substitute some of the Bi ions with La ions to obtain ferroelectric Bi3.25La0.75Ti3O12 films. In addition to fatigue-free characteristics, these new materials have excellent properties of FRAM applications, including a low processing temperature and a large remnant polarization value.
| Original language | English |
|---|---|
| Pages | 237-242 |
| Number of pages | 6 |
| State | Published - 2000 |
| Event | 12th IEEE International Symposium on Applications of Ferroelectrics - Honolulu, HI, United States Duration: 2000.07.21 → 2000.08.2 |
Conference
| Conference | 12th IEEE International Symposium on Applications of Ferroelectrics |
|---|---|
| Country/Territory | United States |
| City | Honolulu, HI |
| Period | 00.07.21 → 00.08.2 |
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