A novel PDMS/parylene microvalve with three dimentional dome petal shape

Jonghyun Oh; Gyuman Kim; Hongseok Noh

doi:10.1109/MEMSYS.2010.5442396

A novel PDMS/parylene microvalve with three dimentional dome petal shape

Jonghyun Oh^*
, Gyuman Kim
, Hongseok Noh

^*Corresponding author for this work

Nano-Bio Mechanical System Engineering

Drexel University
Kyungpook National University

Research output: Contribution to conference › Conference paper › peer-review

1 Scopus citations

Abstract

We present a novel microvalve for the treatment of a pathological condition, hydrocephalus. This microvalve is made of PDMS/Parylene composite layer which has a 3-D dome petal shape. This geometry enables the microvalve to open easily for forward flows and to close for backward flows. New microfabrication techniques such as domeshaped SU-8 mold fabrication and laser machining for valve opening have been investigated to build the proposed microvalve. The pressure-drop vs. flow rate characteristic of the fabricated microvalve was investigated using in-vitro flow tests.

Original language	English
Title of host publication	MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest
Pages	1075-1078
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2010.5442396
State	Published - 2010
Event	23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 - Hong Kong, China Duration: 2010.01.24 → 2010.01.28

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Conference

Conference	23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010
Country/Territory	China
City	Hong Kong
Period	10.01.24 → 10.01.28

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

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10.1109/MEMSYS.2010.5442396

Cite this

Oh, J., Kim, G., & Noh, H. (2010). A novel PDMS/parylene microvalve with three dimentional dome petal shape. In MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest (pp. 1075-1078). Article 5442396 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2010.5442396

@inproceedings{0390d930f9894b0496b77d8c93c0dcee,

title = "A novel PDMS/parylene microvalve with three dimentional dome petal shape",

abstract = "We present a novel microvalve for the treatment of a pathological condition, hydrocephalus. This microvalve is made of PDMS/Parylene composite layer which has a 3-D dome petal shape. This geometry enables the microvalve to open easily for forward flows and to close for backward flows. New microfabrication techniques such as domeshaped SU-8 mold fabrication and laser machining for valve opening have been investigated to build the proposed microvalve. The pressure-drop vs. flow rate characteristic of the fabricated microvalve was investigated using in-vitro flow tests.",

author = "Jonghyun Oh and Gyuman Kim and Hongseok Noh",

year = "2010",

doi = "10.1109/MEMSYS.2010.5442396",

language = "English",

isbn = "9781424457649",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

pages = "1075--1078",

booktitle = "MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest",

note = "23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 ; Conference date: 24-01-2010 Through 28-01-2010",

}

Oh, J, Kim, G & Noh, H 2010, A novel PDMS/parylene microvalve with three dimentional dome petal shape. in MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest., 5442396, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 1075-1078, 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010, Hong Kong, China, 10.01.24. https://doi.org/10.1109/MEMSYS.2010.5442396

A novel PDMS/parylene microvalve with three dimentional dome petal shape. / Oh, Jonghyun; Kim, Gyuman; Noh, Hongseok.
MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest. 2010. p. 1075-1078 5442396 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Contribution to conference › Conference paper › peer-review

TY - GEN

T1 - A novel PDMS/parylene microvalve with three dimentional dome petal shape

AU - Oh, Jonghyun

AU - Kim, Gyuman

AU - Noh, Hongseok

PY - 2010

Y1 - 2010

N2 - We present a novel microvalve for the treatment of a pathological condition, hydrocephalus. This microvalve is made of PDMS/Parylene composite layer which has a 3-D dome petal shape. This geometry enables the microvalve to open easily for forward flows and to close for backward flows. New microfabrication techniques such as domeshaped SU-8 mold fabrication and laser machining for valve opening have been investigated to build the proposed microvalve. The pressure-drop vs. flow rate characteristic of the fabricated microvalve was investigated using in-vitro flow tests.

AB - We present a novel microvalve for the treatment of a pathological condition, hydrocephalus. This microvalve is made of PDMS/Parylene composite layer which has a 3-D dome petal shape. This geometry enables the microvalve to open easily for forward flows and to close for backward flows. New microfabrication techniques such as domeshaped SU-8 mold fabrication and laser machining for valve opening have been investigated to build the proposed microvalve. The pressure-drop vs. flow rate characteristic of the fabricated microvalve was investigated using in-vitro flow tests.

UR - https://www.scopus.com/pages/publications/77952769886

U2 - 10.1109/MEMSYS.2010.5442396

DO - 10.1109/MEMSYS.2010.5442396

M3 - Conference paper

AN - SCOPUS:77952769886

SN - 9781424457649

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 1075

EP - 1078

BT - MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest

T2 - 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010

Y2 - 24 January 2010 through 28 January 2010

ER -

A novel PDMS/parylene microvalve with three dimentional dome petal shape

Abstract

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UN SDGs

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