@inproceedings{0b2fb03fd2dc4c2da300769d8ac568a9,
title = "A study on the electrical properties of the BaTiO 3 ceramic thin films",
abstract = "Polycrystalline BaTiO 3 thin films have been prepared on slid grass substrate by RF/DC magnetron sputtering equipment. The films were deposited at evoporator system and were annealed at heattreatment. The films had a dense microstruture with fine grains. The electrical properties of the films were dramatically controlled with annealing. Samples Preparation were analyzed in term of PTCR(positive temperature coefficient of Resistivity) Samples were made in the substrate tempera-true of 400°C deposition time of 10 hours,and forward power of 210watt. R-T(resistivity-tempera-true) Characteristics of the samples were investigated as a function of the substrate type and the ambient temperature. The resistivity of the thin film specimens was compared with that of the bulk type specimens. By using RF/DC magnetron sputtering system, we obtained lower resistivity in the thermistor with thin BaTiO 3 film than that in the bulk type thermistor.",
keywords = "BaTiO3, Thermistor, Thin Film",
author = "Im, \{Ik Tae\} and Jo, \{Hyun Seob\} and Oh, \{Sung Hoon\} and So, \{Byung Moon\}",
year = "2011",
doi = "10.1007/978-3-642-27180-9\_44",
language = "English",
isbn = "9783642271793",
series = "Communications in Computer and Information Science",
pages = "361--367",
booktitle = "Grid and Distributed Computing - International Conference, GDC 2011, Held as Part of the Future Generation Information Technology Conference, FGIT 2011, Proceedings",
note = "International Conference on Grid and Distributed Computing, GDC 2011, Held as Part of the 3rd International Mega-Conference on Future-Generation Information Technology, FGIT 2011 ; Conference date: 08-12-2011 Through 10-12-2011",
}