A uniform glow discharge plasma source at atmospheric pressure

Se Youn Moon; W. Choe; B. K. Kang

doi:10.1063/1.1639135

A uniform glow discharge plasma source at atmospheric pressure

Se Youn Moon
, W. Choe^*
, B. K. Kang

^*Corresponding author for this work

Department of Quantum System Engineering

Korea Advanced Institute of Science and Technology
PLASMART Company

Research output: Contribution to journal › Journal article › peer-review

201 Scopus citations

Abstract

A large-area, atmospheric pressure, continuous, uniform plasma source was developed. The resulting source uses a DBD-type hardware arrangement in which a dielectric material covering electrodes was found to limit the overcurrent leading to arc and assists producing a stable, uniform glow plasma at atmospheric pressure.

Original language	English
Pages (from-to)	188-190
Number of pages	3
Journal	Applied Physics Letters
Volume	84
Issue number	2
DOIs	https://doi.org/10.1063/1.1639135
State	Published - 2004.01.12

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title = "A uniform glow discharge plasma source at atmospheric pressure",

abstract = "A large-area, atmospheric pressure, continuous, uniform plasma source was developed. The resulting source uses a DBD-type hardware arrangement in which a dielectric material covering electrodes was found to limit the overcurrent leading to arc and assists producing a stable, uniform glow plasma at atmospheric pressure.",

author = "Moon, \{Se Youn\} and W. Choe and Kang, \{B. K.\}",

year = "2004",

month = jan,

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doi = "10.1063/1.1639135",

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AU - Moon, Se Youn

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AU - Kang, B. K.

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N2 - A large-area, atmospheric pressure, continuous, uniform plasma source was developed. The resulting source uses a DBD-type hardware arrangement in which a dielectric material covering electrodes was found to limit the overcurrent leading to arc and assists producing a stable, uniform glow plasma at atmospheric pressure.

AB - A large-area, atmospheric pressure, continuous, uniform plasma source was developed. The resulting source uses a DBD-type hardware arrangement in which a dielectric material covering electrodes was found to limit the overcurrent leading to arc and assists producing a stable, uniform glow plasma at atmospheric pressure.

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DO - 10.1063/1.1639135

M3 - Journal article

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SN - 0003-6951

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EP - 190

JO - Applied Physics Letters

JF - Applied Physics Letters

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A uniform glow discharge plasma source at atmospheric pressure

Abstract

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