Absolute density measurement of hydrogen atom in inductively coupled Ar/H2 plasmas using vacuum ultraviolet absorption spectroscopy

Deog Gyun Cho; Jonggu Han; Duksun Han; Se Youn Moon

doi:10.1016/j.cap.2020.02.001

Absolute density measurement of hydrogen atom in inductively coupled Ar/H₂ plasmas using vacuum ultraviolet absorption spectroscopy

Deog Gyun Cho
, Jonggu Han
, Duksun Han
, Se Youn Moon^*

^*Corresponding author for this work

Department of Quantum System Engineering

Jeonbuk National University
National Fusion Research Institute

Research output: Contribution to journal › Journal article › peer-review

7 Scopus citations

Abstract

The absolute density measurement of atomic species such as hydrogen is crucial for plasma processing because of their strong chemical reactivity. In this work, to measure the hydrogen atom density in Ar/H₂ inductively coupled plasmas (ICP), the self-absorption-applied vacuum ultraviolet absorption spectroscopy (VUVAS) is studied with a micro-hollow cathode H₂/He discharge lamp (MHCL) emitting VUV light (Lyman alpha line; L_α 121.56 nm). The absolute density of hydrogen atoms in the ICP is investigated for various powers (50 W–850 W) in the low pressure region (30 mTorr–50 mTorr). The hydrogen density in remote plasma region is shown to vary from 2.1 × 10¹¹ cm⁻³ to 1.25 × 10¹² cm⁻³ with respect to plasma power.

Original language	English
Pages (from-to)	550-556
Number of pages	7
Journal	Current Applied Physics
Volume	20
Issue number	4
DOIs	https://doi.org/10.1016/j.cap.2020.02.001
State	Published - 2020.04

Keywords

Hydrogen atom density
inductively coupled plasma
Lowpressure
Self-absorption
VUV absorption spectroscopy

Quacquarelli Symonds(QS) Subject Topics

Materials Science
Physics & Astronomy

Access to Document

10.1016/j.cap.2020.02.001

Cite this

@article{65a86c7096984eb383775b4ab39cfe5a,

title = "Absolute density measurement of hydrogen atom in inductively coupled Ar/H2 plasmas using vacuum ultraviolet absorption spectroscopy",

abstract = "The absolute density measurement of atomic species such as hydrogen is crucial for plasma processing because of their strong chemical reactivity. In this work, to measure the hydrogen atom density in Ar/H2 inductively coupled plasmas (ICP), the self-absorption-applied vacuum ultraviolet absorption spectroscopy (VUVAS) is studied with a micro-hollow cathode H2/He discharge lamp (MHCL) emitting VUV light (Lyman alpha line; Lα 121.56 nm). The absolute density of hydrogen atoms in the ICP is investigated for various powers (50 W–850 W) in the low pressure region (30 mTorr–50 mTorr). The hydrogen density in remote plasma region is shown to vary from 2.1 × 1011 cm−3 to 1.25 × 1012 cm−3 with respect to plasma power.",

keywords = "Hydrogen atom density, inductively coupled plasma, Lowpressure, Self-absorption, VUV absorption spectroscopy",

author = "Cho, \{Deog Gyun\} and Jonggu Han and Duksun Han and Moon, \{Se Youn\}",

note = "Publisher Copyright: {\textcopyright} 2020 Korean Physical Society",

year = "2020",

month = apr,

doi = "10.1016/j.cap.2020.02.001",

language = "English",

volume = "20",

pages = "550--556",

journal = "Current Applied Physics",

issn = "1567-1739",

number = "4",

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TY - JOUR

T1 - Absolute density measurement of hydrogen atom in inductively coupled Ar/H2 plasmas using vacuum ultraviolet absorption spectroscopy

AU - Cho, Deog Gyun

AU - Han, Jonggu

AU - Han, Duksun

AU - Moon, Se Youn

PY - 2020/4

Y1 - 2020/4

N2 - The absolute density measurement of atomic species such as hydrogen is crucial for plasma processing because of their strong chemical reactivity. In this work, to measure the hydrogen atom density in Ar/H2 inductively coupled plasmas (ICP), the self-absorption-applied vacuum ultraviolet absorption spectroscopy (VUVAS) is studied with a micro-hollow cathode H2/He discharge lamp (MHCL) emitting VUV light (Lyman alpha line; Lα 121.56 nm). The absolute density of hydrogen atoms in the ICP is investigated for various powers (50 W–850 W) in the low pressure region (30 mTorr–50 mTorr). The hydrogen density in remote plasma region is shown to vary from 2.1 × 1011 cm−3 to 1.25 × 1012 cm−3 with respect to plasma power.

AB - The absolute density measurement of atomic species such as hydrogen is crucial for plasma processing because of their strong chemical reactivity. In this work, to measure the hydrogen atom density in Ar/H2 inductively coupled plasmas (ICP), the self-absorption-applied vacuum ultraviolet absorption spectroscopy (VUVAS) is studied with a micro-hollow cathode H2/He discharge lamp (MHCL) emitting VUV light (Lyman alpha line; Lα 121.56 nm). The absolute density of hydrogen atoms in the ICP is investigated for various powers (50 W–850 W) in the low pressure region (30 mTorr–50 mTorr). The hydrogen density in remote plasma region is shown to vary from 2.1 × 1011 cm−3 to 1.25 × 1012 cm−3 with respect to plasma power.

KW - Hydrogen atom density

KW - inductively coupled plasma

KW - Lowpressure

KW - Self-absorption

KW - VUV absorption spectroscopy

UR - https://www.scopus.com/pages/publications/85079045450

U2 - 10.1016/j.cap.2020.02.001

DO - 10.1016/j.cap.2020.02.001

M3 - Journal article

AN - SCOPUS:85079045450

SN - 1567-1739

VL - 20

SP - 550

EP - 556

JO - Current Applied Physics

JF - Current Applied Physics

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ER -