Achievement of extremely high vacuum using a cryopump and conflat aluminium gaskets

Hwa Chung Jhung Kwang Hwa Chung Jhung; Hong Seung-Soo; Jae Hong Park; Yong Hyun Shin; Jae Young Leem; Chul Ro Lee

doi:10.1016/0042-207X(92)90162-P

Achievement of extremely high vacuum using a cryopump and conflat aluminium gaskets

Hwa Chung Jhung Kwang Hwa Chung Jhung^*
, Hong Seung-Soo
, Jae Hong Park
, Yong Hyun Shin
, Jae Young Leem
, Chul Ro Lee

^*Corresponding author for this work

Information Materials Engineering

Korea Research Institute of Standards and Science

Research output: Contribution to journal › Journal article › peer-review

1 Scopus citations

Abstract

An extremely high vacuum of 2 × 10^-12 mbar, the lowest pressure measurable with the extractor gauge, was achieved using a closed loop helium refrigerator type cryopump and conflat aluminium gaskets. The preparation of aluminium gaskets and the baking process of the vacuum system and the cryopump are reported here.

Original language	English
Pages (from-to)	309-311
Number of pages	3
Journal	Vacuum
Volume	43
Issue number	4
DOIs	https://doi.org/10.1016/0042-207X(92)90162-P
State	Published - 1992.04

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10.1016/0042-207X(92)90162-P

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title = "Achievement of extremely high vacuum using a cryopump and conflat aluminium gaskets",

abstract = "An extremely high vacuum of 2 × 10-12 mbar, the lowest pressure measurable with the extractor gauge, was achieved using a closed loop helium refrigerator type cryopump and conflat aluminium gaskets. The preparation of aluminium gaskets and the baking process of the vacuum system and the cryopump are reported here.",

author = "\{Kwang Hwa Chung Jhung\}, \{Hwa Chung Jhung\} and Hong Seung-Soo and Park, \{Jae Hong\} and Shin, \{Yong Hyun\} and Leem, \{Jae Young\} and Lee, \{Chul Ro\}",

year = "1992",

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doi = "10.1016/0042-207X(92)90162-P",

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journal = "Vacuum",

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T1 - Achievement of extremely high vacuum using a cryopump and conflat aluminium gaskets

AU - Kwang Hwa Chung Jhung, Hwa Chung Jhung

AU - Seung-Soo, Hong

AU - Park, Jae Hong

AU - Shin, Yong Hyun

AU - Leem, Jae Young

AU - Lee, Chul Ro

PY - 1992/4

Y1 - 1992/4

N2 - An extremely high vacuum of 2 × 10-12 mbar, the lowest pressure measurable with the extractor gauge, was achieved using a closed loop helium refrigerator type cryopump and conflat aluminium gaskets. The preparation of aluminium gaskets and the baking process of the vacuum system and the cryopump are reported here.

AB - An extremely high vacuum of 2 × 10-12 mbar, the lowest pressure measurable with the extractor gauge, was achieved using a closed loop helium refrigerator type cryopump and conflat aluminium gaskets. The preparation of aluminium gaskets and the baking process of the vacuum system and the cryopump are reported here.

UR - https://www.scopus.com/pages/publications/0026853068

U2 - 10.1016/0042-207X(92)90162-P

DO - 10.1016/0042-207X(92)90162-P

M3 - Journal article

AN - SCOPUS:0026853068

SN - 0042-207X

VL - 43

SP - 309

EP - 311

JO - Vacuum

JF - Vacuum

IS - 4

ER -

Achievement of extremely high vacuum using a cryopump and conflat aluminium gaskets

Abstract

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