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Advanced characterization technique for the extraction of intrinsic effective mobility in ultra-thin-body strained SOI MOSFETs

  • Myungsoo Seo
  • , Hagyoul Bae
  • , Chang Hoon Jeon
  • , Byung Hyun Lee
  • , Yang Kyu Choi
  • Korea Advanced Institute of Science and Technology
  • Samsung

Research output: Contribution to conferenceConference paperpeer-review

Abstract

An accurate method of extracting intrinsic effective mobility is proposed which considers the parasitic component and floating-body effects. The technique was verified with fabricated ultra-thin body (UTB) strained silicon-on-insulator (sSOI) MOSFETs. The accurate mobility values extracted using the newly proposed technique, were then comparatively analyzed. This novel method corrects the underestimation of mobility produced by the parasitic component and the overestimated mobility resulting from the floating-body effects.

Original languageEnglish
Title of host publication2017 IEEE SOI-3D-Subthreshold Microelectronics Unified Conference, S3S 2017
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1-2
Number of pages2
ISBN (Electronic)9781538637654
DOIs
StatePublished - 2017.07.2
Event2017 IEEE SOI-3D-Subthreshold Microelectronics Unified Conference, S3S 2017 - Burlingame, United States
Duration: 2017.10.162017.10.18

Publication series

Name2017 IEEE SOI-3D-Subthreshold Microelectronics Unified Conference, S3S 2017
Volume2018-March

Conference

Conference2017 IEEE SOI-3D-Subthreshold Microelectronics Unified Conference, S3S 2017
Country/TerritoryUnited States
CityBurlingame
Period17.10.1617.10.18

Keywords

  • Effective Mobility
  • Floating-Body Effects
  • Qinv Correction Factor
  • Strained SOI (sSOI)
  • Ultra-thin-body (UTB)

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