Ambiguity solving of dynamic spectroscopic ellipsometry by using a wedge-window monolithic polarizing interferometric device

Saeid Kheiryzadehkhanghah; Gukhyeon Hwang; Cheongsong Kim; Inho Choi; Sukhyun Choi; Changsug Lee; Youngmin Kim; Robert Magnusson; Daesuk Kim

doi:10.1364/AO.555995

Ambiguity solving of dynamic spectroscopic ellipsometry by using a wedge-window monolithic polarizing interferometric device

Saeid Kheiryzadehkhanghah
, Gukhyeon Hwang
, Cheongsong Kim
, Inho Choi
, Sukhyun Choi
, Changsug Lee
, Youngmin Kim
, Robert Magnusson
, Daesuk Kim^*

^*Corresponding author for this work

Division of Mechanical System Engineering

Jeonbuk National University
University of Texas at Arlington

Research output: Contribution to journal › Journal article › peer-review

Abstract

This paper describes a dynamic spectroscopic ellipsometer that can extract accurate 9(λ) and 1(λ) dynamically without ambiguity problems. We address how quadratic equations cause ambiguity in extracting 9(k) and how the ambiguity problem is solved by employing a wedge-window monolithic polarizing interferometric (W-MPI) device. To prove the benefit of the proposed W-MPI scheme, some experiments are conducted using four thin-film samples with a wide range of thicknesses. In this study, we demonstrate the dynamic measurement capability of both 9(λ) and 1(λ) by a video clip to emphasize the potential of the proposed scheme.

Original language	English
Pages (from-to)	2979-2986
Number of pages	8
Journal	Applied Optics
Volume	64
Issue number	11
DOIs	https://doi.org/10.1364/AO.555995
State	Published - 2025.04.10

Quacquarelli Symonds(QS) Subject Topics

Engineering - Electrical & Electronic
Engineering - Petroleum
Physics & Astronomy

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@article{0f45a26cffa64b71b55acbe5742165d3,

title = "Ambiguity solving of dynamic spectroscopic ellipsometry by using a wedge-window monolithic polarizing interferometric device",

abstract = "This paper describes a dynamic spectroscopic ellipsometer that can extract accurate 9(λ) and 1(λ) dynamically without ambiguity problems. We address how quadratic equations cause ambiguity in extracting 9(k) and how the ambiguity problem is solved by employing a wedge-window monolithic polarizing interferometric (W-MPI) device. To prove the benefit of the proposed W-MPI scheme, some experiments are conducted using four thin-film samples with a wide range of thicknesses. In this study, we demonstrate the dynamic measurement capability of both 9(λ) and 1(λ) by a video clip to emphasize the potential of the proposed scheme.",

author = "Saeid Kheiryzadehkhanghah and Gukhyeon Hwang and Cheongsong Kim and Inho Choi and Sukhyun Choi and Changsug Lee and Youngmin Kim and Robert Magnusson and Daesuk Kim",

note = "Publisher Copyright: {\textcopyright} 2025 Optica Publishing Group. All rights, including for text and data mining (TDM), Artificial Intelligence (AI) training, and similar technologies, are reserved.",

year = "2025",

month = apr,

day = "10",

doi = "10.1364/AO.555995",

language = "English",

volume = "64",

pages = "2979--2986",

journal = "Applied Optics",

issn = "1559-128X",

number = "11",

}

TY - JOUR

T1 - Ambiguity solving of dynamic spectroscopic ellipsometry by using a wedge-window monolithic polarizing interferometric device

AU - Kheiryzadehkhanghah, Saeid

AU - Hwang, Gukhyeon

AU - Kim, Cheongsong

AU - Choi, Inho

AU - Choi, Sukhyun

AU - Lee, Changsug

AU - Kim, Youngmin

AU - Magnusson, Robert

AU - Kim, Daesuk

PY - 2025/4/10

Y1 - 2025/4/10

N2 - This paper describes a dynamic spectroscopic ellipsometer that can extract accurate 9(λ) and 1(λ) dynamically without ambiguity problems. We address how quadratic equations cause ambiguity in extracting 9(k) and how the ambiguity problem is solved by employing a wedge-window monolithic polarizing interferometric (W-MPI) device. To prove the benefit of the proposed W-MPI scheme, some experiments are conducted using four thin-film samples with a wide range of thicknesses. In this study, we demonstrate the dynamic measurement capability of both 9(λ) and 1(λ) by a video clip to emphasize the potential of the proposed scheme.

AB - This paper describes a dynamic spectroscopic ellipsometer that can extract accurate 9(λ) and 1(λ) dynamically without ambiguity problems. We address how quadratic equations cause ambiguity in extracting 9(k) and how the ambiguity problem is solved by employing a wedge-window monolithic polarizing interferometric (W-MPI) device. To prove the benefit of the proposed W-MPI scheme, some experiments are conducted using four thin-film samples with a wide range of thicknesses. In this study, we demonstrate the dynamic measurement capability of both 9(λ) and 1(λ) by a video clip to emphasize the potential of the proposed scheme.

UR - https://www.scopus.com/pages/publications/105002414864

U2 - 10.1364/AO.555995

DO - 10.1364/AO.555995

M3 - Journal article

C2 - 40793109

AN - SCOPUS:105002414864

SN - 1559-128X

VL - 64

SP - 2979

EP - 2986

JO - Applied Optics

JF - Applied Optics

IS - 11

ER -

Ambiguity solving of dynamic spectroscopic ellipsometry by using a wedge-window monolithic polarizing interferometric device

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