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Atomic Layer Deposition of GeTe Films Using Ge{N[Si(CH3)(3)](2)}(2), {(CH3)(3)Si}(2)Te, and Methanol

  • Deok-Yong Cho

Research output: Contribution to journalJournal articlepeer-review

Original languageKorean
JournalChemistry of Materials
StatePublished - 2016.10.11

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