BaTiO₃-assisted inorganic laser lift-off process for flexible micro-light-emitting diodes

Extensively studied transfer methods for producing high-performance flexible micro-light-emitting diodes (µLEDs) have limitations like high process cost and size constraints. Herein, we report a novel inorganic-based laser lift-off (ILLO) process, in which a new BaTiO₃ (BTO) sacrificial layer is used to fabricate flexible thin-film µLEDs. The process, associated laser conditions, and carrier substrate types were optimized using theoretical simulations and experiments. The BTO sacrificial layer was successfully applied to the ILLO process via laser–material interactions, as verified by material analyses. Vertically structured flexible µLEDs were realized using BTO-based delamination, demonstrating the method’s applicability to next-generation electronics. Graphical abstract: [Figure not available: see fulltext.]