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Carbon-nanotube-based nonvolatile memory with oxide-nitride-oxide film and nanoscale channel

  • Won Bong Choi*
  • , Soodoo Chae
  • , Eunju Bae
  • , Jo Won Lee
  • , Byoung Ho Cheong
  • , Jae Ryoung Kim
  • , Ju Jin Kim
  • *Corresponding author for this work
  • Samsung
  • Jeonbuk National University

Research output: Contribution to journalJournal articlepeer-review

Abstract

A top-gate structure in which the gate electrode was located within the predefined carbon nanotubes (CNT) channel was fabricated. The charges were stored in oxide-nitride-oxide (ONO) traps. The stored charges increased the threshold voltage with quasiquantized energy state. This suggested that the ONO has traps with quasiquantized energy state.

Original languageEnglish
Pages (from-to)275-277
Number of pages3
JournalApplied Physics Letters
Volume82
Issue number2
DOIs
StatePublished - 2003.01.13

Quacquarelli Symonds(QS) Subject Topics

  • Physics & Astronomy

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