Characteristics of nanocrystalline AlN:Er films co-deposited by using AlN, Er, and SiO₂ targets

We report the characteristics of AlN:Er films that were co-deposited by using AlN, Er, and SiO₂ targets. The PL emission spectra show strong green emissions of Er³⁺ ions in AlN:Er films annealed at an optimal temperature of 750 °C, which is attributed to the intra-4f Er³⁺ transitions of ²H_11/2 → ⁴I_15/2 and ⁴F_7/2 → ⁴I_15/2. This optimal temperature can activate Er species as an efficient visible luminescence center. High-resolution transmission electron microscopy (HREM) observations showed that the AlN:Er film annealed at 750 °C exhibits the microstructure of AlN nanocrystallites embedded in the amorphous matrix. The occurrence of strong Er³⁺ emissions in the amorphous-nanocrystalline AlN:Er films by thermal annealing might contribute to an increased number of excitation Er³⁺ centers and the presence of oxygen related to Er³⁺ excitation and recombination processes. A distinct visible bluish green emission is also confirmed from the EL device with an amorphous-nanocrystalline AlN:Er active layer.