Abstract
We report fabrication of miniaturized low temperature co-fired ceramic helical (3-D) inductors with more than seven layers of helices and the conductor linewidth of 100 μm. We achieve the QmaxLeffA product ranging from 200 to 370. Such high values are possible thanks to the drastic reduction of the active area and still acceptably large Qmax and self-resonant frequency. High frequency characterization of the inductors is performed up to 12 GHz, and a new equivalent circuit model considering vertical electromagnetic coupling between conductors is shown to reproduce all the measured characteristics.
| Original language | English |
|---|---|
| Pages (from-to) | 160-162 |
| Number of pages | 3 |
| Journal | IEEE Microwave and Wireless Components Letters |
| Volume | 17 |
| Issue number | 3 |
| DOIs | |
| State | Published - 2007.03 |
Keywords
- Helical inductor
- Low temperature co-fired ceramic (LTCC)
- Q-factor
- Wideband modeling
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