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Characterization of SiGe/Si quantum dot grown by using APRPCVD

  • T. S. Kim
  • , M. R. Jeong
  • , N. J. Mun
  • , Y. H. Kil
  • , J. D. Kim
  • , T. S. Jeong
  • , S. Kang
  • , S. H. Kim
  • , C. J. Choi
  • , K. H. Shim
  • Jeonbuk National University
  • Electronics and Telecommunications Research Institute

Research output: Contribution to conferenceConference paperpeer-review

Abstract

We have investigated the characterization of SiGe/Si quantum dot (QD) grown directly onto Si (001) substrates using atmospheric pressure reduced pressure chemical vapor deposition (APRPCVD) system in an ASM Epsilon One. The structural properties of the SiGe/Si QD were investigated using X-ray diffraction (XRD), SEM and TEM. The optical properties of the SiGe/Si QD were investigated using Raman spectroscopy and photocurrent (PC) measurement. The transition peaks related to the QD region observed in the PC spectrum were preliminarily assigned to electron-heavy hole (e-hh) and electron-light hole (e-lh) transitions.

Original languageEnglish
Title of host publicationECS Transactions - Analytical Techniques for Semiconductor Materials and Process Characterization 6, ALTECH 2009
PublisherElectrochemical Society Inc.
Pages263-269
Number of pages7
Edition3
ISBN (Electronic)9781607680901
ISBN (Print)9781566777407
DOIs
StatePublished - 2009
EventAnalytical Techniques for Semiconductor Materials and Process Characterization 6, ALTECH 2009 - 216th ECS Meeting - Vienna, Austria
Duration: 2009.10.42009.10.9

Publication series

NameECS Transactions
Number3
Volume25
ISSN (Print)1938-5862
ISSN (Electronic)1938-6737

Conference

ConferenceAnalytical Techniques for Semiconductor Materials and Process Characterization 6, ALTECH 2009 - 216th ECS Meeting
Country/TerritoryAustria
CityVienna
Period09.10.409.10.9

Quacquarelli Symonds(QS) Subject Topics

  • Engineering & Technology

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