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Chip-less wireless electronic skins by remote epitaxial freestanding compound semiconductors

  • Yeongin Kim
  • , Jun Min Suh
  • , Jiho Shin
  • , Yunpeng Liu
  • , Hanwool Yeon
  • , Kuan Qiao
  • , Hyun S. Kum
  • , Chansoo Kim
  • , Han Eol Lee
  • , Chanyeol Choi
  • , Hyunseok Kim
  • , Doyoon Lee
  • , Jaeyong Lee
  • , Ji Hoon Kang
  • , Bo In Park
  • , Sungsu Kang
  • , Jihoon Kim
  • , Sungkyu Kim
  • , Joshua A. Perozek
  • , Kejia Wang
  • Yongmo Park, Kumar Kishen, Lingping Kong, Tomás Palacios, Jungwon Park, Min Chul Park, Hyung Jun Kim, Yun Seog Lee, Kyusang Lee, Sang Hoon Bae, Wei Kong, Jiyeon Han*, Jeehwan Kim*
*Corresponding author for this work
  • Massachusetts Institute of Technology
  • University of Cincinnati
  • Gwangju Institute of Science and Technology
  • Yonsei University
  • Seoul National University
  • Sejong University
  • Zhejiang University
  • Korea Basic Science Institute
  • Korea Institute of Science and Technology
  • University of Science and Technology UST
  • University of Virginia
  • Washington University St. Louis
  • Westlake University
  • Amorepacific Corporation

Research output: Contribution to journalJournal articlepeer-review

Abstract

Recent advances in flexible and stretchable electronics have led to a surge of electronic skin (e-skin)–based health monitoring platforms. Conventional wireless e-skins rely on rigid integrated circuit chips that compromise the overall flexibility and consume considerable power. Chip-less wireless e-skins based on inductor-capacitor resonators are limited to mechanical sensors with low sensitivities. We report a chip-less wireless e-skin based on surface acoustic wave sensors made of freestanding ultrathin single-crystalline piezoelectric gallium nitride membranes. Surface acoustic wave–based e-skin offers highly sensitive, low-power, and long-term sensing of strain, ultraviolet light, and ion concentrations in sweat. We demonstrate weeklong monitoring of pulse. These results present routes to inexpensive and versatile low-power, high-sensitivity platforms for wireless health monitoring devices.

Original languageEnglish
Pages (from-to)859-864
Number of pages6
JournalScience
Volume377
Issue number6608
DOIs
StatePublished - 2022.08.19

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