Co-doping characteristics of Si and Zn with Mg in P-type GaN

We investigated the doping characteristics of Mg doped, Mg-Si co-doped, and Mg-Zn co-doped GaN films grown by metalorganic chemical vapor deposition. We have grown p-GaN film with a resistivity of 1.26 Ω cm and a hole density of 4.3 × 10¹⁷ cm^-3 by means of Mg-Si co-doping technique. The Mg-Si co-doping characteristic was also explained effectively by taking advantage of the concept of competitive adsorption between Mg and Si during the growth. For Mg-Zn co-doping, p-GaN showing a low electrical resistivity (0.7 Ω cm) and a high hole concentration (8.5 × 10 ¹⁷ cm^-3) was successfully grown without the degradation of structural quality of the film. Besides, the measured specific contact resistance for Mg-Zn co-doped GaN film is 5.0 × 10⁴ Ω cm², which is lower value by one order of magnitude than that for only Mg doped GaN film (1.9 × 10^{- 3}Ωcm ²).