@inproceedings{c911a5a944a54093b35889d4f258369a,
title = "Collection of silicone nanoparticles in ingot growing process and analysis of particle characteristics",
abstract = "This study was conducted to investigate the characteristics of silicon nanoparticles using waste vapors generated from a single-crystal silicon ingot growth furnace and to study their potential applications. The silicon vapors generated in the silicon ingot growth furnace were collected in the form of nanoparticles, and SEM, EDS, BET and XRD analyzes were performed to analyze the characteristics of the collected particles. The particles were in the form of agglomerated nanoparticles with a specific surface area of 176m2/g and were amorphous SiOx particles with low crystallinity. In the future, we plan to study the application fields of the collected nanoparticles.",
keywords = "Ingot growth process, Particle characterization, Particle collection, Silicon nanoparticles",
author = "Junghyun Kim and Jiho Ahn and Kang, \{Hee Yong\} and Lee, \{Gyo Woo\}",
note = "Publisher Copyright: {\textcopyright} 2018 Trans Tech Publications, Switzerland.; 7th International Conference on Advanced Materials and Engineering Materials, ICAMEM 2018 ; Conference date: 17-05-2018 Through 18-05-2018",
year = "2018",
doi = "10.4028/www.scientific.net/KEM.777.145",
language = "English",
isbn = "9783035713718",
series = "Key Engineering Materials",
publisher = "Trans Tech Publications Ltd",
pages = "145--149",
editor = "Wei, \{Peng Sheng\}",
booktitle = "Advanced Materials and Engineering Materials VII",
}