Skip to main navigation Skip to search Skip to main content

Comparative study of fabricated junctionless and inversion-mode nanowire FETs

  • Chan Hoon Park
  • , Myung Dong Ko
  • , Ki Hyun Kim
  • , Chang Woo Sohn
  • , Chang Ki Baek
  • , Yoon Ha Jeong
  • , Jeong Soo Lee
  • Pohang University of Science and Technology

Research output: Contribution to conferenceConference paperpeer-review

Abstract

For the higher degree of integration and better performance of a device, the feature size of conventional MOSFET is expected to go down under 20 nm within a few years [1] and the nanowire FET (NWFET) is the most conspicuous candidate for the future device application. However, in the case of conventional inversion mode NWFETs (cINT), the formation of an abrupt junction for the source/drain (SD) is one of the technical obstacles [2]. Recently, junctionless NWFETs (JNT) where the channel and SD region are doped with the same dopant type has been suggested [3]. In this work, the n-type JNTs and cINT are fabricated with the gate length (LG) of 20 ∼ 250 nm and compared their electrical DC characteristics and low-frequency noise characteristics.

Original languageEnglish
Title of host publication69th Device Research Conference, DRC 2011 - Conference Digest
Pages179-180
Number of pages2
DOIs
StatePublished - 2011
Event69th Device Research Conference, DRC 2011 - Santa Barbara, CA, United States
Duration: 2011.06.202011.06.22

Publication series

NameDevice Research Conference - Conference Digest, DRC
ISSN (Print)1548-3770

Conference

Conference69th Device Research Conference, DRC 2011
Country/TerritoryUnited States
CitySanta Barbara, CA
Period11.06.2011.06.22

Fingerprint

Dive into the research topics of 'Comparative study of fabricated junctionless and inversion-mode nanowire FETs'. Together they form a unique fingerprint.

Cite this