Abstract
The development of a palladium-based Coplanar Waveguide (CPW) microwave sensor for detecting Dimethyl methyl phosphonate (DMMP) vapor is designed, fabricated, and tested in this paper. The sensor is fabricated using a thin palladium layer on a planar quartz substrate. Microwave transmission loss variations were used to identify the presence of DMMP vapor in a controlled environment. The presence of 400 parts per million (ppm) DMMP caused detectable changes in the transmission (S21) and admittance (Y11) parameters.
| Original language | English |
|---|---|
| Pages (from-to) | 654-661 |
| Number of pages | 8 |
| Journal | Journal of Semiconductor Technology and Science |
| Volume | 25 |
| Issue number | 6 |
| DOIs | |
| State | Published - 2025.12 |
Keywords
- CPW
- dimethyl methyl phosphonate (DMMP)
- microwave
- microwave sensor
- palladium
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