Abstract
We investigated the optical and the crystal qualities of InGaN/GaN quantum wells (QWs) grown on nonpolar a-plane (1 1 2 0) GaN/r-sapphire by introducing the novel 2-step growth method without low temperature GaN or AlN buffer layer. In spite of achievement of macroscopic specular surface structure of a-plane GaN epilayer, the surface defects were developed after growing InGaN/GaN QWs. The surface defect density of InGaN was decreased by enhancing the crystallinity of a-plane GaN template. From high-resolution X-ray ω/2θ scan, the interfacial qualities of InGaN/GaN QWs would deteriorate with increasing surface defect density. In addition, high PL emission intensity and uniformity of InGaN/GaN QWs were obtained by improving the crystal quality of a-plane GaN/r-sapphire due to the abrupt interfacial quality and the reduction of the surface defect in InGaN active regions.
| Original language | English |
|---|---|
| Pages (from-to) | 19-22 |
| Number of pages | 4 |
| Journal | Journal of Crystal Growth |
| Volume | 326 |
| Issue number | 1 |
| DOIs | |
| State | Published - 2011.07.1 |
Keywords
- A1. High-resolution X-ray diffraction
- A3. Metalorganic chemical vapor deposition
- B1. Nitrides
Quacquarelli Symonds(QS) Subject Topics
- Materials Science
- Chemistry
- Physics & Astronomy
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