Current-Source-Type Pulse Current Generator with Reduced Waveform Distortion for Capacitively Coupled Plasma Systems
- Beomseok Chae
- , Juhwa Min
- , Yongsug Suh*
- , Hyejin Kim
- , Hyunbae Kim
*Corresponding author for this work
- Jeonbuk National University
- Samsung
Research output: Contribution to journal › Journal article › peer-review
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