Determination of the two-dimensional distribution of plasma parameters in an atmospheric microwave plasma

Se Youn Moon; W. Choe; Y. S. Hwang; J. J. Choi

Determination of the two-dimensional distribution of plasma parameters in an atmospheric microwave plasma

Se Youn Moon^*
, W. Choe
, Y. S. Hwang
, J. J. Choi

^*Corresponding author for this work

Department of Quantum System Engineering

Korea Advanced Institute of Science and Technology

Research output: Contribution to journal › Conference article › peer-review

Abstract

Using a 2.45 GHz microwave source, Ar-O₂ plasma was produced at atmospheric pressure in an azimuthally symmetric geometry. Optical emission spectroscopic method was used to measure the line-of-sight integrated emission spectrum at different microwave power and gas flow rate. A two-dimensional (r,z) distribution of the plasma density, electron temperature, and gas temperature was obtained by means of Abel inversion analysis. From the result, the effect of the ambient air on the atmospheric microwave plasma was investigated.

Original language	English
Pages (from-to)	145
Number of pages	1
Journal	IEEE International Conference on Plasma Science
State	Published - 2002
Event	2002 IEEE International Conference on plasma Science - Banff, Alta., Canada Duration: 2002.05.26 → 2002.05.30

Cite this

@article{1d9b7eb89b234b97866516e425afab3b,

title = "Determination of the two-dimensional distribution of plasma parameters in an atmospheric microwave plasma",

abstract = "Using a 2.45 GHz microwave source, Ar-O2 plasma was produced at atmospheric pressure in an azimuthally symmetric geometry. Optical emission spectroscopic method was used to measure the line-of-sight integrated emission spectrum at different microwave power and gas flow rate. A two-dimensional (r,z) distribution of the plasma density, electron temperature, and gas temperature was obtained by means of Abel inversion analysis. From the result, the effect of the ambient air on the atmospheric microwave plasma was investigated.",

author = "Moon, \{Se Youn\} and W. Choe and Hwang, \{Y. S.\} and Choi, \{J. J.\}",

year = "2002",

language = "English",

pages = "145",

journal = "IEEE International Conference on Plasma Science",

issn = "0730-9244",

note = "2002 IEEE International Conference on plasma Science ; Conference date: 26-05-2002 Through 30-05-2002",

}

TY - JOUR

T1 - Determination of the two-dimensional distribution of plasma parameters in an atmospheric microwave plasma

AU - Moon, Se Youn

AU - Choe, W.

AU - Hwang, Y. S.

AU - Choi, J. J.

PY - 2002

Y1 - 2002

N2 - Using a 2.45 GHz microwave source, Ar-O2 plasma was produced at atmospheric pressure in an azimuthally symmetric geometry. Optical emission spectroscopic method was used to measure the line-of-sight integrated emission spectrum at different microwave power and gas flow rate. A two-dimensional (r,z) distribution of the plasma density, electron temperature, and gas temperature was obtained by means of Abel inversion analysis. From the result, the effect of the ambient air on the atmospheric microwave plasma was investigated.

AB - Using a 2.45 GHz microwave source, Ar-O2 plasma was produced at atmospheric pressure in an azimuthally symmetric geometry. Optical emission spectroscopic method was used to measure the line-of-sight integrated emission spectrum at different microwave power and gas flow rate. A two-dimensional (r,z) distribution of the plasma density, electron temperature, and gas temperature was obtained by means of Abel inversion analysis. From the result, the effect of the ambient air on the atmospheric microwave plasma was investigated.

UR - https://www.scopus.com/pages/publications/0036366152

M3 - Conference article

AN - SCOPUS:0036366152

SN - 0730-9244

SP - 145

JO - IEEE International Conference on Plasma Science

JF - IEEE International Conference on Plasma Science

T2 - 2002 IEEE International Conference on plasma Science

Y2 - 26 May 2002 through 30 May 2002

ER -

Determination of the two-dimensional distribution of plasma parameters in an atmospheric microwave plasma

Abstract

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