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Development of microstructure in nanostructures and thin films

  • Max O. Bloomfield*
  • , Yeon Ho Im
  • , Jian Wang
  • , Hanchen Huang
  • , Timothy S. Cale
  • *Corresponding author for this work
  • Rensselaer Polytechnic Institute

Research output: Contribution to journalConference articlepeer-review

Abstract

We have created a finite-element based, multiple-material, levelset-based code to implicitly represent and track evolving islands and grains. With this method, the code can track island growth in the dimensions through nucleation to coalescence into a grain structure. We discuss the numerical methods, capabilities, and limitations of the code, and then examine the microstructures that result from different models of growth based on starting structures derived from atomistic Monte Carlo simulations. We show simulation results from a kinetically limited process (electroless deposition), a transport-limited process (physical vapor deposition), and a process neither transport nor kinetically limited (physical vapor deposition with orientation dependent sticking factors).

Original languageEnglish
Pages (from-to)378-389
Number of pages12
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume5118
DOIs
StatePublished - 2003
EventNonatechnology - Maspalomas, Gran Canaria, Spain
Duration: 2003.05.192003.05.21

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