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Development of transient voltage suppressor device with abrupt junctions embedded by epitaxial growth technology

  • S. S. Choi
  • , D. H. Cho
  • , K. H. Shim*
  • *Corresponding author for this work
  • Jeonbuk National University
  • Sigetronics, Inc.

Research output: Contribution to journalJournal articlepeer-review

Abstract

A new Zener transient voltage suppressor (TVS) consisting of abrupt junctions of epitaxial layers has been developed. Differential resistance in the breakdown region is obtained as low as 5 Ω, and the reverse leakage current is substantially suppressed by one to two orders of magnitude compared to a conventional Zener diode. The reliability of the TVS is confirmed based on its maximum allowed reverse current level and the robustness of its electrostatic discharge endurance against ±8 kV of the human body model (HBM) at a wide range of operating temperatures (30°C to 180°C). This significant improvement is primarily attributed to the abrupt junction profile formed by low-temperature processes, followed by epitaxial growth technology prohibiting redistribution of dopant elements.

Original languageEnglish
Pages (from-to)59-62
Number of pages4
JournalElectronic Materials Letters
Volume5
Issue number2
DOIs
StatePublished - 2009.06

Keywords

  • Avalanche
  • Breakdown
  • Epitaxy
  • ESD
  • HBM
  • LED
  • TVS
  • Zener

Quacquarelli Symonds(QS) Subject Topics

  • Materials Science

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