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Direct observation of nanofabrication using the optical microscope combined with nanopipette/QTF-AFM system

  • S. An
  • , C. Stambaugh
  • , S. Kwon
  • , K. Lee
  • , B. Kim
  • , Q. Kim
  • , W. Jhe
  • Seoul National University
  • National Institute of Standards and Technology

Research output: Contribution to conferenceConference paperpeer-review

Abstract

We demonstrated direct observation of nanofabrication using the optical microscope (OM) combined with nanopipette/QTF-AFM (Quartz Tuning Fork-Atomic Force Microscopy) system. Various solutions are ejected onto the substrate through the nano-/micro-aperture of the pulled pipette, and the nano-/microscale objects were formed in on-demand spot of the surface with the patterning system. Lithography with various materials can be realized with any liquid solution and sample, such as nanoparticles, PDMS, nanowires by monitoring the fluid phenomena on the substrate with the home-made OM. After forming of capillary condensation between apex of the pipette tip and the surface, the electric field is applied to extract out the inside liquid to the substrate and the nano-microscale objects are fabricated. The nanoscale patterning size can be controlled by the aperture diameters of the pulled pipette.

Original languageEnglish
Title of host publicationTechnical Proceedings of the 2013 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2013
Pages477-480
Number of pages4
StatePublished - 2013
EventNanotechnology 2013: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - 2013 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2013 - Washington, DC, United States
Duration: 2013.05.122013.05.16

Publication series

NameTechnical Proceedings of the 2013 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2013
Volume2

Conference

ConferenceNanotechnology 2013: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - 2013 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2013
Country/TerritoryUnited States
CityWashington, DC
Period13.05.1213.05.16

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

  1. SDG 9 - Industry, Innovation, and Infrastructure
    SDG 9 Industry, Innovation, and Infrastructure

Keywords

  • Liquid delivery
  • Nano-Patterning
  • Nanopipette/QTF-AFM
  • PDMS

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