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Direct observation of oxygen-induced structural changes in stainless-steel surfaces

  • Boklae Cho
  • , Sukmin Chung
  • , Kijeong Kim
  • , Taihee Kang
  • , Chongdo Park
  • , Bongsoo Kim
  • Pohang University of Science and Technology

Research output: Contribution to journalJournal articlepeer-review

Abstract

The oxidation-induced structural changes on the oxide film on stainless steel surface was investigated using atomic force microscopy and X-ray photoelectron spectroscopy. There exists a critical pressure that results from the competition between oxidation temperature and oxygen pressure. Slow oxidation at an annealing temperature of 450 °C and oxygen partial pressure of 1×10-9 Torr resulted in the formation of a smooth Cr2O3 thin film.

Original languageEnglish
Pages (from-to)868-872
Number of pages5
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume18
Issue number2
DOIs
StatePublished - 2000.03

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