Abstract
The oxidation-induced structural changes on the oxide film on stainless steel surface was investigated using atomic force microscopy and X-ray photoelectron spectroscopy. There exists a critical pressure that results from the competition between oxidation temperature and oxygen pressure. Slow oxidation at an annealing temperature of 450 °C and oxygen partial pressure of 1×10-9 Torr resulted in the formation of a smooth Cr2O3 thin film.
| Original language | English |
|---|---|
| Pages (from-to) | 868-872 |
| Number of pages | 5 |
| Journal | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
| Volume | 18 |
| Issue number | 2 |
| DOIs | |
| State | Published - 2000.03 |
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