Direct spectral phase function calculation for dispersive interferometric thickness profilometry

Daesuk Kim; Soohyun Kim

doi:10.1364/OPEX.12.005117

Direct spectral phase function calculation for dispersive interferometric thickness profilometry

Daesuk Kim^*
, Soohyun Kim

^*Corresponding author for this work

Division of Mechanical System Engineering

Korea Advanced Institute of Science and Technology

Research output: Contribution to journal › Journal article › peer-review

25 Scopus citations

Abstract

A direct spectral phase function calculation method based on spectral phase shifting is described. We show experimentally that the direct phase function calculation method can provide a simple and fast solution in calculating the spectral phase function, while maintaining the same level of accurate measurement capability as that based on the Fourier transform approach.

Original language	English
Pages (from-to)	5117-5124
Number of pages	8
Journal	Optics Express
Volume	12
Issue number	21
DOIs	https://doi.org/10.1364/OPEX.12.005117
State	Published - 2004.10

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title = "Direct spectral phase function calculation for dispersive interferometric thickness profilometry",

abstract = "A direct spectral phase function calculation method based on spectral phase shifting is described. We show experimentally that the direct phase function calculation method can provide a simple and fast solution in calculating the spectral phase function, while maintaining the same level of accurate measurement capability as that based on the Fourier transform approach.",

author = "Daesuk Kim and Soohyun Kim",

year = "2004",

month = oct,

doi = "10.1364/OPEX.12.005117",

language = "English",

volume = "12",

pages = "5117--5124",

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AU - Kim, Daesuk

AU - Kim, Soohyun

PY - 2004/10

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AB - A direct spectral phase function calculation method based on spectral phase shifting is described. We show experimentally that the direct phase function calculation method can provide a simple and fast solution in calculating the spectral phase function, while maintaining the same level of accurate measurement capability as that based on the Fourier transform approach.

UR - https://www.scopus.com/pages/publications/9144246362

U2 - 10.1364/OPEX.12.005117

DO - 10.1364/OPEX.12.005117

M3 - Journal article

AN - SCOPUS:9144246362

SN - 1094-4087

VL - 12

SP - 5117

EP - 5124

JO - Optics Express

JF - Optics Express

IS - 21

ER -

Direct spectral phase function calculation for dispersive interferometric thickness profilometry

Abstract

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