Abstract
It is known that semiconducting two-dimensional transition metal dichalcogenides such as MoS2 and WSe2, widely attracted as advanced field-effect transistors (FETs) due to good surface roughness in nano-scale and outstanding gate control with the desired bandgap, are significantly affected by oxygen and water molecules in air. Here, the channel thickness-dependent ambient effects on operation of multi-layer MoS2 FETs are investigated for the first time. In particular, a multi-layer MoS2 FET with channel thickness similar to the maximum depletion width (Dmax) exhibited dramatic changes in the on-current to off-current (Ion/Ioff) ratio under ambient conditions. The results were verified using numerical simulations. Our work is important in terms of the development and optimization of highly sensitive chemical or gas sensors, and it furthers our understanding of how multi-layer MoS2 FETs operate.
| Original language | English |
|---|---|
| Article number | 111868 |
| Journal | Microelectronic Engineering |
| Volume | 264 |
| DOIs | |
| State | Published - 2022.08.15 |
Keywords
- Ambient effect
- Channel thickness- dependence
- I/I ratio
- Maximum depletion width (D)
- MoS FETs
- Numerical simulation
- Semiconducting two-dimensional transition-metal dichalcogenides
Quacquarelli Symonds(QS) Subject Topics
- Materials Science
- Engineering - Electrical & Electronic
- Engineering - Petroleum
- Physics & Astronomy
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