TY - GEN
T1 - Dynamic spectro-ellipsometry based on a spectral interferometric phase extraction method
AU - Dembele, Vamara
AU - Kasu, Ramachandran
AU - Choi, Inho
AU - Madhan, Jayakumar Paul
AU - Kim, Junho
AU - Kim, Daesuk
N1 - Publisher Copyright:
© OSA 2017.
PY - 2017
Y1 - 2017
N2 - A dynamic spectro-ellipsometer is developed to measure a spectral phase difference of thin film object in less than 100ms. It requires neither moving parts nor time dependent modulation. This makes the proposed system ideal for real-time high-speed process monitoring and control in various industrial applications.
AB - A dynamic spectro-ellipsometer is developed to measure a spectral phase difference of thin film object in less than 100ms. It requires neither moving parts nor time dependent modulation. This makes the proposed system ideal for real-time high-speed process monitoring and control in various industrial applications.
UR - https://www.scopus.com/pages/publications/85026313086
U2 - 10.1364/DH.2017.M4A.5
DO - 10.1364/DH.2017.M4A.5
M3 - Conference paper
AN - SCOPUS:85026313086
SN - 9781943580286
T3 - Optics InfoBase Conference Papers
BT - Digital Holography and Three-Dimensional Imaging, DH 2017
PB - Optica Publishing Group (formerly OSA)
T2 - Digital Holography and Three-Dimensional Imaging, DH 2017
Y2 - 29 May 2017 through 1 June 2017
ER -