Dynamic spectroscopic ellipsometry based on a one-piece polarizing interferometric scheme

Vamara Dembele; Sukhyun Choi; Won Chegal; Inho Choi; Madhan Jayakumar Paul; Junho Kim; Daesuk Kim

doi:10.1016/j.optcom.2019.124426

Dynamic spectroscopic ellipsometry based on a one-piece polarizing interferometric scheme

Vamara Dembele
, Sukhyun Choi
, Won Chegal
, Inho Choi
, Madhan Jayakumar Paul
, Junho Kim
, Daesuk Kim^*

^*Corresponding author for this work

Division of Mechanical System Engineering

Research output: Contribution to journal › Journal article › peer-review

18 Scopus citations

Abstract

A dynamic spectroscopic ellipsometer based on a one-piece interferometric polarization-modulation is described. The proposed system can provide spectro-ellipsometric parameters Ψ (λ) and Δ (λ) with a real time speed of a few tens of milliseconds for 1,640-points spectra while maintaining high precision of less than 0.02 degrees. The ultrafast measurement capability enables the novel concept to be applied for a dynamic solution by which we can measure even the thin film thickness of moving samples dynamically.

Original language	English
Article number	124426
Journal	Optics Communications
Volume	454
DOIs	https://doi.org/10.1016/j.optcom.2019.124426
State	Published - 2020.01.1

Keywords

Ellipsometry
Interferometry
Metrological instrumentation
Phase measurement
Thin films

Quacquarelli Symonds(QS) Subject Topics

Materials Science
Engineering - Electrical & Electronic
Engineering - Petroleum
Chemistry
Physics & Astronomy

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10.1016/j.optcom.2019.124426

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@article{bd8c94fb62a34874a9464810bfad31e8,

title = "Dynamic spectroscopic ellipsometry based on a one-piece polarizing interferometric scheme",

abstract = "A dynamic spectroscopic ellipsometer based on a one-piece interferometric polarization-modulation is described. The proposed system can provide spectro-ellipsometric parameters Ψ (λ) and Δ (λ) with a real time speed of a few tens of milliseconds for 1,640-points spectra while maintaining high precision of less than 0.02 degrees. The ultrafast measurement capability enables the novel concept to be applied for a dynamic solution by which we can measure even the thin film thickness of moving samples dynamically.",

keywords = "Ellipsometry, Interferometry, Metrological instrumentation, Phase measurement, Thin films",

author = "Vamara Dembele and Sukhyun Choi and Won Chegal and Inho Choi and Paul, \{Madhan Jayakumar\} and Junho Kim and Daesuk Kim",

note = "Publisher Copyright: {\textcopyright} 2019",

year = "2020",

month = jan,

day = "1",

doi = "10.1016/j.optcom.2019.124426",

language = "English",

volume = "454",

journal = "Optics Communications",

issn = "0030-4018",

}

TY - JOUR

T1 - Dynamic spectroscopic ellipsometry based on a one-piece polarizing interferometric scheme

AU - Dembele, Vamara

AU - Choi, Sukhyun

AU - Chegal, Won

AU - Choi, Inho

AU - Paul, Madhan Jayakumar

AU - Kim, Junho

AU - Kim, Daesuk

PY - 2020/1/1

Y1 - 2020/1/1

N2 - A dynamic spectroscopic ellipsometer based on a one-piece interferometric polarization-modulation is described. The proposed system can provide spectro-ellipsometric parameters Ψ (λ) and Δ (λ) with a real time speed of a few tens of milliseconds for 1,640-points spectra while maintaining high precision of less than 0.02 degrees. The ultrafast measurement capability enables the novel concept to be applied for a dynamic solution by which we can measure even the thin film thickness of moving samples dynamically.

AB - A dynamic spectroscopic ellipsometer based on a one-piece interferometric polarization-modulation is described. The proposed system can provide spectro-ellipsometric parameters Ψ (λ) and Δ (λ) with a real time speed of a few tens of milliseconds for 1,640-points spectra while maintaining high precision of less than 0.02 degrees. The ultrafast measurement capability enables the novel concept to be applied for a dynamic solution by which we can measure even the thin film thickness of moving samples dynamically.

KW - Ellipsometry

KW - Interferometry

KW - Metrological instrumentation

KW - Phase measurement

KW - Thin films

UR - https://www.scopus.com/pages/publications/85071140792

U2 - 10.1016/j.optcom.2019.124426

DO - 10.1016/j.optcom.2019.124426

M3 - Journal article

AN - SCOPUS:85071140792

SN - 0030-4018

VL - 454

JO - Optics Communications

JF - Optics Communications

M1 - 124426

ER -

Dynamic spectroscopic ellipsometry based on a one-piece polarizing interferometric scheme

Abstract

Keywords

Quacquarelli Symonds(QS) Subject Topics

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