Dynamic spectroscopic imaging ellipsometry

Daesuk Kim; Vamara Dembele; Sukhyun Choi; Gukhyeon Hwang; Saeid Kheiryzadehkhanghah; Chulmin Joo; Robert Magnusson

doi:10.1364/OL.451064

Dynamic spectroscopic imaging ellipsometry

Daesuk Kim^*
, Vamara Dembele
, Sukhyun Choi
, Gukhyeon Hwang
, Saeid Kheiryzadehkhanghah
, Chulmin Joo
, Robert Magnusson

^*Corresponding author for this work

Division of Mechanical System Engineering

Research output: Contribution to journal › Journal article › peer-review

11 Scopus citations

Abstract

A dynamic spectroscopic imaging ellipsometer (DSIE) employing a monolithic polarizing interferometer is described. The proposed DSIE system can provide spatio-spectral ellipsometric phase map data ∆(λ, x) dynamically at a speed of 30 Hz. We demonstrate the ultrafast mapping capability of the spectroscopic ellipsometer by measuring a patterned 8-inch full wafer with a spatial resolution of less than 50 × 50 µm² in an hour.

Original language	English
Pages (from-to)	1129-1132
Number of pages	4
Journal	Optics Letters
Volume	47
Issue number	5
DOIs	https://doi.org/10.1364/OL.451064
State	Published - 2022.03.1

Quacquarelli Symonds(QS) Subject Topics

Physics & Astronomy

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title = "Dynamic spectroscopic imaging ellipsometry",

abstract = "A dynamic spectroscopic imaging ellipsometer (DSIE) employing a monolithic polarizing interferometer is described. The proposed DSIE system can provide spatio-spectral ellipsometric phase map data ∆(λ, x) dynamically at a speed of 30 Hz. We demonstrate the ultrafast mapping capability of the spectroscopic ellipsometer by measuring a patterned 8-inch full wafer with a spatial resolution of less than 50 × 50 µm2 in an hour.",

author = "Daesuk Kim and Vamara Dembele and Sukhyun Choi and Gukhyeon Hwang and Saeid Kheiryzadehkhanghah and Chulmin Joo and Robert Magnusson",

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AU - Kim, Daesuk

AU - Dembele, Vamara

AU - Choi, Sukhyun

AU - Hwang, Gukhyeon

AU - Kheiryzadehkhanghah, Saeid

AU - Joo, Chulmin

AU - Magnusson, Robert

PY - 2022/3/1

Y1 - 2022/3/1

N2 - A dynamic spectroscopic imaging ellipsometer (DSIE) employing a monolithic polarizing interferometer is described. The proposed DSIE system can provide spatio-spectral ellipsometric phase map data ∆(λ, x) dynamically at a speed of 30 Hz. We demonstrate the ultrafast mapping capability of the spectroscopic ellipsometer by measuring a patterned 8-inch full wafer with a spatial resolution of less than 50 × 50 µm2 in an hour.

AB - A dynamic spectroscopic imaging ellipsometer (DSIE) employing a monolithic polarizing interferometer is described. The proposed DSIE system can provide spatio-spectral ellipsometric phase map data ∆(λ, x) dynamically at a speed of 30 Hz. We demonstrate the ultrafast mapping capability of the spectroscopic ellipsometer by measuring a patterned 8-inch full wafer with a spatial resolution of less than 50 × 50 µm2 in an hour.

UR - https://www.scopus.com/pages/publications/85125191369

U2 - 10.1364/OL.451064

DO - 10.1364/OL.451064

M3 - Journal article

C2 - 35230308

AN - SCOPUS:85125191369

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VL - 47

SP - 1129

EP - 1132

JO - Optics Letters

JF - Optics Letters

IS - 5

ER -

Dynamic spectroscopic imaging ellipsometry

Abstract

Quacquarelli Symonds(QS) Subject Topics

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