Dynamics of Silicon Particles in DC Silane Plasmas Transported by a Modulated Magnetic Field

By using a Mie scattering method, dynamics of silicon particles in DC and AC silane plasmas in the presence of a modulated magnetic field, B, perpendicular to the discharge electric field, E, were observed. In AC plasmas, Mie scattering signals were not observed. In DC plasmas, silicon particles were transported in the opposite direction of the E ×B drift, and particle density was decreased with increasing applied magnetic flux density. The experimental results support the assumption that spatially inhomogeneous discharge current by E ×B drift causes the balance among electrostatic force, ion drag force and force of gravity exerted on the particles to be lost and generates the particle transport.