Skip to main navigation Skip to search Skip to main content

Effect of post metallization annealing on structural and electrical properties of Ge metal-oxide-semiconductor (MOS) capacitors with Pt/HfO2 gate stack

Research output: Contribution to journalJournal articlepeer-review

Original languageKorean
JournalMicroelectronic Engineering
StatePublished - 2012.01.1

Cite this