@inproceedings{141784ea505e4b3f89c1277c544c403e,
title = "Electrical variable capacitor for RF plasma systems with a short capacitance variable time",
abstract = "In this paper, a new electrical variable capacitor (EVC) circuit is proposed to achieve short capacitance variable time. The limitations of the conventional EVC circuits are solved by switching the position of the PiN diode and the capacitor and by adding a shunt inductor. The proposed EVC circuit can achieve a short capacitance variable time with a smaller filter inductor by reducing RF voltage stress on the filter inductor.",
keywords = "Capacitance variable time, Electrical variable capacitor (EVC), Impedance matching, RF plasma system",
author = "Kim, \{Hong Min\} and Hwang, \{Cheong Hyeon\} and Lim, \{Cheon Yong\}",
note = "Publisher Copyright: {\textcopyright} 2023 The Korean Institute of Power Electronics.; 11th International Conference on Power Electronics - ECCE Asia, ICPE 2023-ECCE Asia ; Conference date: 22-05-2023 Through 25-05-2023",
year = "2023",
doi = "10.23919/ICPE2023-ECCEAsia54778.2023.10213651",
language = "English",
series = "ICPE 2023-ECCE Asia - 11th International Conference on Power Electronics - ECCE Asia: Green World with Power Electronics",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1268--1273",
booktitle = "ICPE 2023-ECCE Asia - 11th International Conference on Power Electronics - ECCE Asia",
}