@inproceedings{708f2aecccb94c3d989334e369f60bb5,
title = "Electrical Variable Capacitor of Reduced Switch Count and Voltage Stress for 13.56MHz RF Plasma System",
abstract = "This paper introduces a novel Electrical Variable Capacitor (EVC) circuit for use in the impedance matching circuits employed by 13.56MHz RF plasma systems. The proposed design employs a turn on/off using bias current and voltage condition technology, reducing the number of active components necessary for the EVC to operate. Simulations and experiments comparing the proposed EVC to state-of-the-art alternatives confirmed that the proposed design successfully operated with the reduced number of active components, and that the automatic switching action in the power semiconductor switch may improve the impedance matching circuits used in high-power and high-frequency RF plasma system.",
keywords = "capacitance variable time, electrical variable capacitor, impedance matcher, RF plasma, voltage stress",
author = "Juhwa Min and Yongsug Suh",
note = "Publisher Copyright: {\textcopyright} 2021 IEEE.; 13th IEEE Energy Conversion Congress and Exposition, ECCE 2021 ; Conference date: 10-10-2021 Through 14-10-2021",
year = "2021",
doi = "10.1109/ECCE47101.2021.9595200",
language = "English",
series = "2021 IEEE Energy Conversion Congress and Exposition, ECCE 2021 - Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "5933--5939",
booktitle = "2021 IEEE Energy Conversion Congress and Exposition, ECCE 2021 - Proceedings",
}