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Fabrication of a bottom electrode for a nano-scale beam resonator using backside exposure with a self-aligned metal mask

  • Yong Seok Lee
  • , Yun Ho Jang
  • , Yong Seung Bang
  • , Jung Mu Kim
  • , Jong Man Kim
  • , Yong Kweon Kim*
    • *Corresponding author for this work
  • Seoul National University
  • Pusan National University

Research output: Contribution to journal › Journal article › peer-review

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