Fabrication of MgB2 thin films on r-Al2O3 substrates by rf sputtering and thermal evaporation

S. C. Park; J. K. Chung; S. G. Kang; K. J. Song; C. J. Kim; C. J. Kim

doi:10.1016/j.physc.2008.05.105

Fabrication of MgB₂ thin films on r-Al₂O₃ substrates by rf sputtering and thermal evaporation

S. C. Park
, J. K. Chung
, S. G. Kang
, K. J. Song
, C. J. Kim
, C. J. Kim^*

^*Corresponding author for this work

Physics Education

Gyeongsang National University
Changwon National University
Korea Electrotechnology Research Institute
Korea Atomic Energy Research Institute

Research output: Contribution to journal › Journal article › peer-review

7 Scopus citations

Abstract

Superconducting MgB₂ thin films on the r-Al₂O₃ substrates have been grown by the combination of radio frequency magnetron sputtering of B and thermal evaporation of Mg, followed by in situ and ex situ annealing. The MgB₂ layers had ∼200 nm in average thickness and exhibited non-stoichiometry in Mg content. The Mg content in the grown MgB₂ layers could be controlled by the temperature of the evaporator and the opening diameter of the shutter. Superconducting transition temperatures have been measured and showed around ∼38 K depending on the Mg content and the annealing condition.

Original language	English
Pages (from-to)	1879-1883
Number of pages	5
Journal	Physica C: Superconductivity and its Applications
Volume	468
Issue number	15-20
DOIs	https://doi.org/10.1016/j.physc.2008.05.105
State	Published - 2008.09.15

Keywords

MgB
rf Magnetron sputtering
Thermal evaporation

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10.1016/j.physc.2008.05.105

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@article{2d6f61343c2a45118f026db0f9ee0aa0,

title = "Fabrication of MgB2 thin films on r-Al2O3 substrates by rf sputtering and thermal evaporation",

abstract = "Superconducting MgB2 thin films on the r-Al2O3 substrates have been grown by the combination of radio frequency magnetron sputtering of B and thermal evaporation of Mg, followed by in situ and ex situ annealing. The MgB2 layers had ∼200 nm in average thickness and exhibited non-stoichiometry in Mg content. The Mg content in the grown MgB2 layers could be controlled by the temperature of the evaporator and the opening diameter of the shutter. Superconducting transition temperatures have been measured and showed around ∼38 K depending on the Mg content and the annealing condition.",

keywords = "MgB, rf Magnetron sputtering, Thermal evaporation",

author = "Park, \{S. C.\} and Chung, \{J. K.\} and Kang, \{S. G.\} and Song, \{K. J.\} and Kim, \{C. J.\} and Kim, \{C. J.\}",

year = "2008",

month = sep,

day = "15",

doi = "10.1016/j.physc.2008.05.105",

language = "English",

volume = "468",

pages = "1879--1883",

journal = "Physica C: Superconductivity and its Applications",

issn = "0921-4534",

number = "15-20",

}

TY - JOUR

T1 - Fabrication of MgB2 thin films on r-Al2O3 substrates by rf sputtering and thermal evaporation

AU - Park, S. C.

AU - Chung, J. K.

AU - Kang, S. G.

AU - Song, K. J.

AU - Kim, C. J.

PY - 2008/9/15

Y1 - 2008/9/15

N2 - Superconducting MgB2 thin films on the r-Al2O3 substrates have been grown by the combination of radio frequency magnetron sputtering of B and thermal evaporation of Mg, followed by in situ and ex situ annealing. The MgB2 layers had ∼200 nm in average thickness and exhibited non-stoichiometry in Mg content. The Mg content in the grown MgB2 layers could be controlled by the temperature of the evaporator and the opening diameter of the shutter. Superconducting transition temperatures have been measured and showed around ∼38 K depending on the Mg content and the annealing condition.

AB - Superconducting MgB2 thin films on the r-Al2O3 substrates have been grown by the combination of radio frequency magnetron sputtering of B and thermal evaporation of Mg, followed by in situ and ex situ annealing. The MgB2 layers had ∼200 nm in average thickness and exhibited non-stoichiometry in Mg content. The Mg content in the grown MgB2 layers could be controlled by the temperature of the evaporator and the opening diameter of the shutter. Superconducting transition temperatures have been measured and showed around ∼38 K depending on the Mg content and the annealing condition.

KW - MgB

KW - rf Magnetron sputtering

KW - Thermal evaporation

UR - https://www.scopus.com/pages/publications/50649101102

U2 - 10.1016/j.physc.2008.05.105

DO - 10.1016/j.physc.2008.05.105

M3 - Journal article

AN - SCOPUS:50649101102

SN - 0921-4534

VL - 468

SP - 1879

EP - 1883

JO - Physica C: Superconductivity and its Applications

JF - Physica C: Superconductivity and its Applications

IS - 15-20

ER -

Fabrication of MgB₂ thin films on r-Al₂O₃ substrates by rf sputtering and thermal evaporation

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Keywords

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