@inproceedings{afb97f1b6ac84a4cbff6479241656c9b,
title = "Fabrication of stress-induced self-rolled metal/insulator bifilm microtube with micromesh walls",
abstract = "A metal/insulator bifilm microtube with micromesh walls was constructed using a stress-assisted self-rolled-up technology. The Pt/Ti/SiO2 microtube with mesh-sidewalls was self-formed by a tensile-stressed metal/insulator thin film through the release of planar micromesh from the silicon substrate by removing underlying sacrificial silicon structures. The metal pads interconnect electrically and support mechanically the freestanding self-rolled microtube. The electrical conductance was measured to show small thermal mass and good thermal isolation properties of the microtube. The diameter of self-rolled microtube is around 25 μm. The beam width and the size of micromesh walls were 0.6 μm and 5 μm, respectively. Thickness of Pt layer and SiO2 layer was both 100 nm.",
keywords = "Metal/insulator bifilms, Micromesh, Microtube, Self-rolling, Thin-film stress",
author = "Lee, \{K. N.\} and Seo, \{Y. T.\} and Kim, \{J. M.\} and Kim, \{Y. K.\} and Lee, \{M. H.\} and Seong, \{W. K.\}",
year = "2013",
doi = "10.1109/Transducers.2013.6626717",
language = "English",
isbn = "9781467359818",
series = "2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013",
pages = "124--127",
booktitle = "2013 Transducers and Eurosensors XXVII",
note = "2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 ; Conference date: 16-06-2013 Through 20-06-2013",
}