| Original language | Korean |
|---|---|
| Journal | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B |
| State | Published - 2014.03.21 |
Cite this
- APA
- Author
- BIBTEX
- Harvard
- Standard
- RIS
- Vancouver
Fabrication of tapered graded-refractive-index micropillars using ion-implanted-photoresist as an etch mask
Research output: Contribution to journal › Journal article › peer-review