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Field electron emission under extreme high vacuum and extreme high vacuum technology of Korea

  • Boklar Cho*
  • , S. Chung
  • , Chuhei Oshima
  • *Corresponding author for this work
  • Japan Science and Technology Agency
  • Waseda University
  • Pohang University of Science and Technology

Research output: Contribution to journalJournal articlepeer-review

Abstract

An extreme high vacuum field emission microscope (XHV-FEM) was constructed for the study of inherent fluctuations of field emission (FE) current. The damping and fluctuation behaviors of FE from clean W(111) tips at 90 K were observed using the XHVFEM. The noise of FE currents ranging from 10 pA to 100 μA was measured under ∼7 × 10-10 Pa. Stepwise features were routinely observed in damping curves of the FE current, indicating remarkable sensitivity of the FE current measuring system. The lowest frequency measurement of shot noise was recorded even at 4 Hz. Semilogarithmic damping curves of FE currents were linear in our thoroughly degassed XHV-FE system. The slope of semilogarithmic damping curves was linearly proportional to the operation pressure, suggesting a method of measuring pressure in an XHV range. An introduction to the XHV technology of Korea is also presented.

Original languageEnglish
Pages (from-to)635-641
Number of pages7
JournalShinku/Journal of the Vacuum Society of Japan
Volume51
Issue number10
DOIs
StatePublished - 2008

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