Fluence dependence of pulsed-laser-deposited epitaxial Sr-Bi-Ta oxide thin films with a cubic fluorite-like phase

Epitaxial Sr-Bi-Ta oxide films of a cubic fluorite-like phase were grown by pulsed laser deposition. As the laser fluence increased, it was found that the lattice constant decreased. Electron-probe microanalysis revealed that the Ta ion concentration was closely related with the change in the lattice constant. Although these films of a cubic fluorite-like phase did not show any ferroelectric properties, they had good electrical properties which might be useful for high-capacitance applications.