High quality SmBa2Cu3O7-δ thin films on SrTiO3 (100) substrates deposited by pulsed electron beam deposition

Kyoung Pil Ko; Seung Hyun Moon; Kyu Jeong Song; Chan Park; Sang Im Yoo

doi:10.1109/TASC.2005.848735

High quality SmBa₂Cu₃O_7-δ thin films on SrTiO₃ (100) substrates deposited by pulsed electron beam deposition

Kyoung Pil Ko^*
, Seung Hyun Moon
, Kyu Jeong Song
, Chan Park
, Sang Im Yoo

^*Corresponding author for this work

Physics Education

Seoul National University
Korea Electrotechnology Research Institute

Research output: Contribution to journal › Journal article › peer-review

8 Scopus citations

Abstract

We for the first time report a successful fabrication of a high-J _C SmBa₂Cu₃O_7-δ(SmBCO) thin film (∼240 nm thickness) on SrTiO₃ (100) substrate by the pulsed electron beam deposition (PED) process. For this study, we systematically investigated the effect of processing parameters, including substrate temperature (Ts), ambient oxygen pressure (PO₂), and target-to-substrate distance, on superconducting properties, including critical temperature (T_C) and critical current density (J_C), of PED-processed SmBCO films. The highest J_C value of 1.37 MA/cm ² at 77 K in self field was obtained from an optimally processed sample using Ts of 900°C (corresponding to real substrate temperature of 810°C), PO₂ of 15 mTorr, and target-to-substrate distance of 9 cm, evidencing that this process is a potential alternative to the PLD process.

Original language	English
Pages (from-to)	3054-3057
Number of pages	4
Journal	IEEE Transactions on Applied Superconductivity
Volume	15
Issue number	2 PART III
DOIs	https://doi.org/10.1109/TASC.2005.848735
State	Published - 2005.06

Keywords

Critical current density
Critical temperature
Pulsed-electron-beam deposition (PED)
SmBCO film

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10.1109/TASC.2005.848735

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@article{d8d37bbc45004bd8829393e6e7ed621d,

title = "High quality SmBa2Cu3O7-δ thin films on SrTiO3 (100) substrates deposited by pulsed electron beam deposition",

abstract = "We for the first time report a successful fabrication of a high-J C SmBa2Cu3O7-δ(SmBCO) thin film (∼240 nm thickness) on SrTiO3 (100) substrate by the pulsed electron beam deposition (PED) process. For this study, we systematically investigated the effect of processing parameters, including substrate temperature (Ts), ambient oxygen pressure (PO2), and target-to-substrate distance, on superconducting properties, including critical temperature (TC) and critical current density (JC), of PED-processed SmBCO films. The highest JC value of 1.37 MA/cm 2 at 77 K in self field was obtained from an optimally processed sample using Ts of 900°C (corresponding to real substrate temperature of 810°C), PO2 of 15 mTorr, and target-to-substrate distance of 9 cm, evidencing that this process is a potential alternative to the PLD process.",

keywords = "Critical current density, Critical temperature, Pulsed-electron-beam deposition (PED), SmBCO film",

author = "Ko, \{Kyoung Pil\} and Moon, \{Seung Hyun\} and Song, \{Kyu Jeong\} and Chan Park and Yoo, \{Sang Im\}",

year = "2005",

month = jun,

doi = "10.1109/TASC.2005.848735",

language = "English",

volume = "15",

pages = "3054--3057",

journal = "IEEE Transactions on Applied Superconductivity",

issn = "1051-8223",

number = "2 PART III",

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TY - JOUR

T1 - High quality SmBa2Cu3O7-δ thin films on SrTiO3 (100) substrates deposited by pulsed electron beam deposition

AU - Ko, Kyoung Pil

AU - Moon, Seung Hyun

AU - Song, Kyu Jeong

AU - Park, Chan

AU - Yoo, Sang Im

PY - 2005/6

Y1 - 2005/6

N2 - We for the first time report a successful fabrication of a high-J C SmBa2Cu3O7-δ(SmBCO) thin film (∼240 nm thickness) on SrTiO3 (100) substrate by the pulsed electron beam deposition (PED) process. For this study, we systematically investigated the effect of processing parameters, including substrate temperature (Ts), ambient oxygen pressure (PO2), and target-to-substrate distance, on superconducting properties, including critical temperature (TC) and critical current density (JC), of PED-processed SmBCO films. The highest JC value of 1.37 MA/cm 2 at 77 K in self field was obtained from an optimally processed sample using Ts of 900°C (corresponding to real substrate temperature of 810°C), PO2 of 15 mTorr, and target-to-substrate distance of 9 cm, evidencing that this process is a potential alternative to the PLD process.

AB - We for the first time report a successful fabrication of a high-J C SmBa2Cu3O7-δ(SmBCO) thin film (∼240 nm thickness) on SrTiO3 (100) substrate by the pulsed electron beam deposition (PED) process. For this study, we systematically investigated the effect of processing parameters, including substrate temperature (Ts), ambient oxygen pressure (PO2), and target-to-substrate distance, on superconducting properties, including critical temperature (TC) and critical current density (JC), of PED-processed SmBCO films. The highest JC value of 1.37 MA/cm 2 at 77 K in self field was obtained from an optimally processed sample using Ts of 900°C (corresponding to real substrate temperature of 810°C), PO2 of 15 mTorr, and target-to-substrate distance of 9 cm, evidencing that this process is a potential alternative to the PLD process.

KW - Critical current density

KW - Critical temperature

KW - Pulsed-electron-beam deposition (PED)

KW - SmBCO film

UR - https://www.scopus.com/pages/publications/22144472221

U2 - 10.1109/TASC.2005.848735

DO - 10.1109/TASC.2005.848735

M3 - Journal article

AN - SCOPUS:22144472221

SN - 1051-8223

VL - 15

SP - 3054

EP - 3057

JO - IEEE Transactions on Applied Superconductivity

JF - IEEE Transactions on Applied Superconductivity

IS - 2 PART III

ER -

High quality SmBa₂Cu₃O_7-δ thin films on SrTiO₃ (100) substrates deposited by pulsed electron beam deposition

Abstract

Keywords

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