@inproceedings{fcbd358a5bf04f0faf135cd0d7f7a42b,
title = "High speed 2D material visualization by using a microscopic dynamic spectroscopic imaging ellipsometer",
abstract = "This paper describes the lateral resolution enhancement of dynamic spectroscopic imaging ellipsometer, aiming to improve its inspection capabilities. Traditional imaging ellipsometers use a rotating optical elements type scheme which typically requires longer acquisition time. Moreover, for spectroscopic applications, an extra spectral scanning mechanism is needed. The proposed system based on a one-piece polarizing interferometric module, can efficiently extract spatio-spectral ellipsometric phase maps of two-dimensional(2D) materials with a spatial resolution of a few microns at a speed of hundreds of Hz.",
keywords = "2D materials, Inspection, Microscopic, One-piece polarizing interferometer, Spectroscopic imaging ellipsometer",
author = "S. Choi and G. Hwang and S. Kheiryzadehkhanghah and I. Choi and W. Chegal and Y. Cho and D. Kim",
note = "Publisher Copyright: {\textcopyright} 2024 SPIE.; Metrology, Inspection, and Process Control XXXVIII 2024 ; Conference date: 26-02-2024 Through 29-02-2024",
year = "2024",
doi = "10.1117/12.3010995",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Sendelbach, \{Matthew J.\} and Schuch, \{Nivea G.\}",
booktitle = "Metrology, Inspection, and Process Control XXXVIII",
}